JPS62117560U - - Google Patents
Info
- Publication number
- JPS62117560U JPS62117560U JP570386U JP570386U JPS62117560U JP S62117560 U JPS62117560 U JP S62117560U JP 570386 U JP570386 U JP 570386U JP 570386 U JP570386 U JP 570386U JP S62117560 U JPS62117560 U JP S62117560U
- Authority
- JP
- Japan
- Prior art keywords
- point
- film
- linear light
- projector
- detection device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007547 defect Effects 0.000 claims 2
- 238000001514 detection method Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 5
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP570386U JPS62117560U (en]) | 1986-01-18 | 1986-01-18 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP570386U JPS62117560U (en]) | 1986-01-18 | 1986-01-18 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS62117560U true JPS62117560U (en]) | 1987-07-25 |
Family
ID=30787535
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP570386U Pending JPS62117560U (en]) | 1986-01-18 | 1986-01-18 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62117560U (en]) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS502388B1 (en]) * | 1969-02-06 | 1975-01-25 |
-
1986
- 1986-01-18 JP JP570386U patent/JPS62117560U/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS502388B1 (en]) * | 1969-02-06 | 1975-01-25 |